ICP_RIE Specification_2
작성자관리자
- 등록일 24-02-26
- 조회153회
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| ICP_RIE |
| ICP_RIE Specification | |||
| 1. SYSTEM DIMENSION | |||
| - General | |||
| Dimension (mm) :850(W) x 700(D) x 1410(H) | |||
| Weight : 350 kg | |||
| Color : Ivory | |||
| 2. CHAMBER MODULE | |||
| - General | |||
| Chamber material :SUS 304 | |||
| Wafer loading/unloading type :Manual specimen | |||
| Port :Vacuum port, View port, Pressure gauge port | |||
| - ICP Source | |||
| · Top Plasma source | |||
| Inductively coupled plasma | |||
| Water cooling or Forced-air cooling | |||
| · Bottom Plasma source | |||
| Capacitively coupled plasma (Bottom electrode) | |||
| ·Substrate | |||
| Wafer size :4 inch (Φ100mm) | |||
| Substrate capacity :1(single) substrate | |||
| 3. VACUUM MODULE | |||
| - Vacuum Pump | |||
| Dry pump (PM) | |||
| Turbo pump (PM) | |||
| Ultimate pressure : 5×10-6 Torr (PM) | |||
| - Pressure Gauge (PM) | |||
| High vacuum gauge :Cold cathode gauge | |||
| Low vacuum gauge :Convectron gauge | |||
| Pressure readout & cable kit | |||
| - Vacuum Pressure Control | |||
| · APC(Automatic Pressure Control) | |||
| Automatic throttle valve | |||
| Throttle valve controller | |||
| Baratron gauge : 1 Torr F.S. | |||
| pan>Ultimate pressure : 5×10-6 Torr (PM) | |||
| - Vacuum Valve | |||
| Main valve :Pneumatic type gate valve | |||
| Fore line valve :Pneumatic type angle valve | |||
| Roughing line valve :Pneumatic type angle valve | |||
| - Vacuum Line | |||
| Auto vent line | |||
| SUS hard line and flexible bellows line | |||
| 4. GAS DELIVERY MODULE | |||
| - Used gases & flow control | |||
| Process gas: | H2 | MFC | (100sccm) |
| O2 | MFC | (100sccm) | |
| Ar | MFC | (100sccm) | |
| Purge & vent : | N2 - | Metering valve | |
| 1㎛ filter for each channel | |||
| - Gas valves & gas line | |||
| It used swagelok pneumatically operated diaphragm valves, which is Air-actuated(N/C) | |||
| Metering valve for N2 purge and vent | |||
| Tubing of 316L stainless steel | |||
| All gas lines are welded by auto-welding method with VCR fitting. | |||
| 5. CONTROL MODULE | |||
| - System control | |||
| · PLC-based automation | |||
| LCD touch pannel, 7 inch TFT | |||
| 32 bit RISC CPU | |||
| On/Off switch | |||
| Emergency switch | |||
